The aim of this contribution is to assess the ferroelectric and piezoelectric properties of Barium Zirconate Titanate- Barium Calcium Titanate (BZTBCT) sol-gel thin films. 400 nm-thick films with a randomly oriented perovskitic crystal structure have been grown on platinum coated silicon wafer by means of repeated deposition by spin coating and subsequent heat treatments (350 °C and 750 °C). Hence, Pt top electrode have been sputtered through shadow mask. The main results are here summarized: Maximum Polarization (Pmax) value equal to 41.3 μC/cm2 obtained in a PE curve (@15 V and 1 kHz) and a calculated value of relative dielectric constant equal to 582 has been estimated from the CV curves (@ 10 V and 1 kHz). Trough displacement measurements it has been possible to estimate an e31,f, (transversal piezoelectric coefficient) equal to 7.99 C/m2 by applying a sine signal at 12.375 kHz (the first vibration mode) and a maximum amplitude of 20 V.
Assessment of Piezolectric Properties on Prototype BZT-BCT Devices / Scaldaferri, R.; Barretta, L.; Aprea, P.; Casuscelli, V.; Barbato, P. S.; Caputo, D.. - 999:(2023), pp. 186-191. ( 21st National Conference on Sensors and Microsystems, AISEM 20222022) [10.1007/978-3-031-25706-3_30].
Assessment of Piezolectric Properties on Prototype BZT-BCT Devices
Aprea P.;Barbato P. S.
Penultimo
;Caputo D.Ultimo
2023
Abstract
The aim of this contribution is to assess the ferroelectric and piezoelectric properties of Barium Zirconate Titanate- Barium Calcium Titanate (BZTBCT) sol-gel thin films. 400 nm-thick films with a randomly oriented perovskitic crystal structure have been grown on platinum coated silicon wafer by means of repeated deposition by spin coating and subsequent heat treatments (350 °C and 750 °C). Hence, Pt top electrode have been sputtered through shadow mask. The main results are here summarized: Maximum Polarization (Pmax) value equal to 41.3 μC/cm2 obtained in a PE curve (@15 V and 1 kHz) and a calculated value of relative dielectric constant equal to 582 has been estimated from the CV curves (@ 10 V and 1 kHz). Trough displacement measurements it has been possible to estimate an e31,f, (transversal piezoelectric coefficient) equal to 7.99 C/m2 by applying a sine signal at 12.375 kHz (the first vibration mode) and a maximum amplitude of 20 V.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
