Green, Homogeneous Solution for BZT-BCT Thin Film Deposition

Barium Zirconate Titanate-Barium Calcium Titanate (BZT-BCT) has been proposed as an alternative material to toxic lead zirconate titanate (commonly referred as PZT) for the production of micro-electro-mechanical devices based on piezoelectric thin films. Among the possible fabrication methods, sol-gel is the most adoptable and cost-effective technology. To produce good quality films, the homogeneity of the solution is a key factor. For this purpose, 2-methoxyethanol (a toxic, carcinogen solvent) is widely used, although such approach affects the environmental sustainability of the fabrication process. This work deals with the development of a “green” high stable precursor solution based on non-toxic and non-carcinogenic solvents. Results showed that a highly stable, homogeneous solution has been produced thanks to a thorough reagents dehydration. By depositing such solution on commercial platinum-coated wafers, thin layers with homogeneous morphology and improved electrical stability have been produced.