Superconductive thin films of Y-Ba-Cu-O have been grown in situ by r.f. magnetron sputtering from a single stoichiometric target on Al2O3 substrates. Zero-resistivity temperatures as high as 73 K have been achieved. X-ray and EDS analyses have been performed on the samples. The dependence of film features on deposition conditions is also discussed.
Insitu Superconducting Y-ba-cu-o Thin-films By Single-target Rf Magnetron Sputtering / Andreone, Antonello; A., Barone; A., Dichiara; F. M., Granozio; Peluso, Giuseppe; SCOTTI DI UCCIO, Umberto; Tafuri, Francesco; F., Fontana; Pepe, GIOVANNI PIERO. - In: NUOVO CIMENTO DELLA SOCIETÀ ITALIANA DI FISICA. D CONDENSED MATTER, ATOMIC, MOLECULAR AND CHEMICAL PHYSICS, BIOPHYSICS. - ISSN 0392-6737. - STAMPA. - 13:(1991), pp. 477-483. [10.1007/BF02452131]
Insitu Superconducting Y-ba-cu-o Thin-films By Single-target Rf Magnetron Sputtering
ANDREONE, ANTONELLO;PELUSO, GIUSEPPE;SCOTTI DI UCCIO, UMBERTO;Tafuri, Francesco;PEPE, GIOVANNI PIERO
1991
Abstract
Superconductive thin films of Y-Ba-Cu-O have been grown in situ by r.f. magnetron sputtering from a single stoichiometric target on Al2O3 substrates. Zero-resistivity temperatures as high as 73 K have been achieved. X-ray and EDS analyses have been performed on the samples. The dependence of film features on deposition conditions is also discussed.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.