We have fabricated a microarray of porous silicon Bragg reflectors on a crystalline silicon substrate using a technological process based on standard photolithography and electrochemical anodization of the silicon. The array density is of 170 elements/cm2 and each element has a diameter of 200 m. The porous silicon structures have been used as platform to immobilize an amino terminated DNA single strand probe. All fabrication steps have been monitored by spectroscopic reflectometry, optical and electron microscopy, and Fourier transform infrared spectroscopy. A label-free detection method has been employed to investigate the hybridization between micromolar DNA probe and its complementary target. Due to fast and low cost production, good reproducibility,and high quality optical features, this platform could be adopted also for other different microarrayapplications such as proteomics and medical diagnostics.
Fabrication and characterization of a porous silicon based microarray forlabel-free optical monitoring of biomolecular interactions / I., Rea; Lamberti, Annalisa; I., Rendina; G., Coppola; M., Gioffrè; M., Iodice; M., Casalino; E., De Tommasi; L., De Stefano. - In: JOURNAL OF APPLIED PHYSICS. - ISSN 0021-8979. - 107:(2010), pp. 014513-014513-4. [10.1063/1.3273410]
Fabrication and characterization of a porous silicon based microarray forlabel-free optical monitoring of biomolecular interactions
LAMBERTI, ANNALISA;
2010
Abstract
We have fabricated a microarray of porous silicon Bragg reflectors on a crystalline silicon substrate using a technological process based on standard photolithography and electrochemical anodization of the silicon. The array density is of 170 elements/cm2 and each element has a diameter of 200 m. The porous silicon structures have been used as platform to immobilize an amino terminated DNA single strand probe. All fabrication steps have been monitored by spectroscopic reflectometry, optical and electron microscopy, and Fourier transform infrared spectroscopy. A label-free detection method has been employed to investigate the hybridization between micromolar DNA probe and its complementary target. Due to fast and low cost production, good reproducibility,and high quality optical features, this platform could be adopted also for other different microarrayapplications such as proteomics and medical diagnostics.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
